Test Line Placement to Improve Die Sawing Quality

ABSTRACT

A semiconductor wafer structure includes a plurality of dies, a first scribe line extending along a first direction, a second scribe line extending along a second direction and intersecting the first scribe line, wherein the first and the second scribe lines have an intersection region. A test line is formed in the scribe line, wherein the test line crosses the intersection region. Test pads are formed in the test line and only outside a free region defined substantially in the intersection region.

This is a divisional application of U.S. application Ser. No.11/525,575, which was filed on Sep. 22, 2006, entitled “Test LinePlacement to Improve Die Sawing Quality,” and is incorporated herein byreference.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application relates to the following commonly assigned U.S. patentapplication Ser. No. 10/675,862, filed Sep. 30, 2003, entitled“Apparatus and Method for Manufacturing a Semiconductor Wafer withReduced Delamination and Peeling,” which patent application isincorporated herein by reference.

TECHNICAL FIELD

This invention relates to the manufacture of semiconductor wafersincluding low-k dielectric materials, and more particularly to a designrule for placing test lines.

BACKGROUND

IC manufacturers are employing finer circuit widths, low dielectricconstant (low-k) materials, and other technologies to make small,high-speed semiconductor devices. Along with these advancements, thechallenges of maintaining yield and throughput have also increased. Withregard to reliability, the presence of low-k material near die cornersincreases the chances of cracks forming, especially in the sawingprocess.

A semiconductor wafer typically comprises substantially isolated dies(or chips) separated from each other by scribe lines. Individual dieswithin the wafer contain circuitry, and the dies are separated by sawingand are individually packaged. Alternately, the individual dies may bepackaged in multi-chip modules. In a semiconductor fabrication process,the semiconductor device (e.g., an integrated circuit IC) must becontinuously tested at every step so as to maintain and assure devicequality. Usually, a testing circuit is simultaneously fabricated on thewafer along with the actual devices. A typical testing method provides aplurality of test pads, which are electrically coupled to an externalterminal through probe needles, located on the scribe lines. The testpads are selected to test different properties of the wafer, such asthreshold voltage, saturation current, gate oxide thickness, or leakagecurrent. Test pads are formed along the scribe lines, thus a logicalconcept “test line” is used to refer to a strip-like region having testpads therein.

In general, the scribe lines are defined in areas of the multi-layerstructure that are without a die pattern and that have a width of about80 to 100 μm depending on the dimensions of the dies manufactured in thewafer. In order to prevent cracks induced during wafer sawing frompropagating into the die, each die is usually surrounded by a seal ringof 3 to 10 μm in width. Nevertheless, during wafer manufacture, damageis often introduced because of the scribe lines. Further, when at leastone layer of the multi-layer structure is composed of a metal materialwith a high thermal expansion coefficient, the dimensional variation ofthe layer is sufficient to introduce high-level internal stress into thewafer in the area of the scribe line. Consequently, portions of thewafer around the scribe line suffer damage, such as peeling,delamination, or dielectric fracture. The types of scribe line damagementioned above are usually observed when the multi-layer structureincludes an inter-metal-dielectric layer of low dielectric constant(low-k).

When considering a design rule for the placement of test pads on thescribe line, a major consideration is that the stress resulting from thesawing process causes serious peeling near the test pads at the diecorners. This results in delamination at the interface between themultiple layers at the die corners. Delamination impacts the reliabilityof the device and contributes to production of stringers (residualmaterials) that interfere with further processing and testing of theintegrated circuit.

U.S. patent application Ser. No. 10/675,862 discusses a design rule forreducing the peeling of low-k dielectric materials at the corners ofdies. Referring to FIG. 1, a top view of a wafer with dies is shown. Thesemiconductor wafer 1 comprises dies (or chips) 6 separated from eachother by first scribe lines 2 and second scribe lines 4. The firstscribe lines 2 extend along a first direction and the second scribelines 4 extend along a second direction. One of the first scribe linesand one of the second scribe lines define an intersection area 8.

A free area 10, which is shaded, is defined. The free area 10 mayinclude the intersection area 8 and regions near the corners of dies.Preferably, no test pads are placed in the free area.

The above-discussed design rule, however, leads to the restriction oftest line placement across scribe lines. With the free area excludingthe placement of test pads, test lines, in which test pads are formed,may not be able to cross the free area and may have to be placed oneither side of the free area. A direct result is that the test linesneed to have lengths less than the length of the dies. When the testline length is greater than the available length of dies, extra spacemay have to be reserved between the dies in order to place the testlines. This results in the waste of wafer area and a reduction in thenumber of chips per wafer.

What is needed, therefore, is a novel design rule and resultingstructure that may reduce the peeling of low-k dielectric material,while at the same time applying the least possible restriction to testline design and placement.

SUMMARY OF THE INVENTION

In accordance with one aspect of the present invention, a semiconductorwafer structure includes a plurality of dies, a first scribe lineextending along a first direction, a second scribe line extending alonga second direction and intersecting the first scribe line, wherein thefirst and the second scribe lines have an intersection region. A testline is formed in the first scribe line, wherein the test line crossesthe intersection region. Test pads are formed in the test line, whereinthe test pads are formed only out of a free region defined substantiallyin the intersection region.

In accordance with another aspect of the present invention, asemiconductor wafer structure includes a die region extending from abottom surface to a top surface of the semiconductor wafer, a scribeline region adjacent the die region and extending from the bottomsurface to the top surface of the semiconductor wafer, test devices inthe scribe line region, a plurality of test pads formed in the scribeline region and in a plurality of dielectric layers. The test pads in atop dielectric layer are connected to the test devices and the test padsin the underlying dielectric layers. The test pads form test lines inthe respective dielectric layers. At least one of the test lines crossesan intersection region of the scribe line region and an additionalscribe line region perpendicular to the scribe line region. Thesemiconductor wafer structure further includes a free region definedsubstantially by the intersection region, wherein formation of test padsin the free region is prohibited.

In accordance with yet another aspect of the present invention, asemiconductor wafer structure includes a first scribe line extendingalong a first direction and adjacent a die, a first maximum kerf regionin the first scribe line, a second scribe line extending along a seconddirection adjacent the die wherein the first and the second scribe lineshave an intersection region, a second maximum kerf region in the secondscribe line, a test line in the first scribe line, wherein the test linecrosses the intersection region, a free region defined by an overlapregion of the first and the second maximum kerf regions, and test padsin the test line and only outside a free region.

In accordance with yet another aspect of the present invention, a methodof fabricating a semiconductor structure includes providing asemiconductor wafer having a first scribe line and a second scribe line,reserving a location for a test line, wherein the location is in thefirst scribe line and crosses an intersection area of the first scribeline and the second scribe line, defining a free region in theintersection area wherein a probability of kerf lines being outside thefree region is substantially low, forming test pads in the location,wherein two of the test pads are placed on opposite sides of the freeregion, and the free region is free from test pads, sawing through thefirst scribe line, and sawing through the second scribe line to separatedies.

The advantageous feature of the present invention includes preventingtest pads from being sawed more than once, so that the low-k dielectricpeeling problem is significantly reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a conventional semiconductor wafer with a free areafor placing test pads;

FIG. 2A illustrates a preferred embodiment of the present invention,wherein a test line is placed across an intersection region of scribelines, and wherein test pads are placed outside the intersection region;

FIG. 2B illustrates a cross-sectional view of the structure shown inFIG. 2A;

FIGS. 2C and 2D are cross-sectional views of intermediate stages in themanufacture of a preferred embodiment shown in FIGS. 2A and 2B;

FIG. 3 illustrates a preferred embodiment of the present invention,wherein two perpendicular test lines are placed across an intersectionregion of scribe lines and out of the intersection region; and

FIGS. 4 and 5 illustrate free regions defined inside an intersectionregion of two intersecting scribe lines.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the presently preferred embodiments arediscussed in detail below. It should be appreciated, however, that thepresent invention provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are merely illustrative of specific ways to makeand use the invention, and do not limit the scope of the invention.

It has been discovered that one of the important causes of the peelingproblem is the sawing of test pads, which are typically formed of metalsand have significantly greater mechanical strength than the low-kdielectric materials in which the test pads are formed. The problem isfurther worsened when the test pads are placed in the intersectionregion of the perpendicular scribe lines, so that the test pads aresawed twice, each in one direction. The preferred embodiment of thepresent invention provides a solution to avoid test pads being sawedtwice.

FIG. 2A illustrates a top view of the preferred embodiment. A chip 20,which is part of a wafer, is enclosed by first scribe lines 30 andsecond scribe lines 32. The first scribe lines 30 are in the Xdirection, and the second scribe lines 32 are in the Y direction. Testlines may be formed on first scribe lines 30 and/or second scribe lines32.

A test line 22 and a test line 24 are shown in FIG. 2A. As is known inthe art, test lines are designed for the convenience of the tests, whichmay be performed during and after the fabrication of integratedcircuits, but before sawing the wafer. Test line 22 includes a pluralityof test pads 23 numbered from 23 ₁ through 23 _(n), which are spacedapart, and preferably in equal distances.

Electrical contacts to test pads 23 ₁ through 23 _(n) are made throughprobe needles 28 ₁ through 28 _(n), respectively, which are assembled ona schematically shown probe card 26. Probe needles 28 ₁ through 28 _(n)are connected to wires, which are further connected to a die-sortmachine. The spacings between the probe needles 28 ₁ through 28 _(n)correspond to the respective spacings of the test pads 23 ₁ through 23_(n). When a test is performed, the probe card 26 is placed above thetest line 22, so that the probe needles 28 ₁ through 28 _(n) are inelectrical contact with corresponding test pads 23 ₁ through 23 _(n).The devices/circuits connected to the test pads can then be tested bythe die-sort machine. After the test is finished, probe card 26 may bemoved to test line 24 to perform a similar test.

Preferably, test lines on a same wafer have same lengths, and thespacings between the test pads are the same from test line to test line.If one test line has a different length and/or spacing from another testline, different probe cards have to be made to be compatible with thetest lines having difference spacing. This is undesirable since highercost and complexity are involved.

In the preferred embodiment, as shown in FIG. 2A, test line 22 is placedacross an intersection region 34, which is an overlap region of one ofthe scribe lines 30 and one of the scribe lines 32. A free region isdefined substantially in the intersection region 34, wherein a freeregion is the region in which the placement of the test pads isrestricted, and design rules are made accordingly to ensure that no testpads are placed in the free region. In the preferred embodiment, thefree region is intersection area 34. The position of the test line 22 ispreferably fine tuned, so that no test pads are placed in the freeregion 34. When the wafer is sawed along the scribe line 32, the testpads 23 ₁ through 23 _(n) are very likely to be sawed in the Xdirection.

However, none of the test pads 23 ₁ through 23 _(n) will be sawed in theY direction. This significantly reduces the likelihood of low-kdielectric peeling.

A cross-sectional view of FIG. 2A, which is taken along a plane crossinga line A-A′, is shown in FIG. 2B. The scribe line 30 is shown as amulti-layer structure 38 on a substrate 36. Substrate 36 may befabricated using bulk Si, SOI, SiGe, GaAs, InP, or other semiconductormaterials. Schematically illustrated devices/circuits 40 are formed onthe substrate 36. The multi-layer structure 38 preferably comprises aplurality of dielectric layers 42 and a plurality of metallizationlayers and connecting vias formed therein. More test lines, such as thetest line formed of test pads 44, are formed in metallization layersunderlying the top metallization layer. A manufacturing process of thestructure shown in FIG. 2B is briefly discussed using illustrations ofFIGS. 2C and 2D.

Referring to FIG. 2C, test devices/circuits 40 are formed on substrate36 and in the scribe line regions. Preferably, test devices/circuits 40are formed using the same process steps used for forming the integratedcircuits in the die regions. An inter-layer dielectric (ILD) 41 isformed over the substrate 36, followed by the formation of contact plugs43 in ILD 41. Contact plugs 43 are preferably formed by etching contactopenings in ILD 41 and filling the openings with conductive materials,which preferably comprise tungsten, aluminum, copper, or otherwell-known alternatives. Contact plugs 43 may have composite structures,including, e.g., barrier and adhesion layers.

A plurality of metallization layers and connecting vias are formed overthe ILD 41 to electrically connect and route electrical connections. Aresulting structure is shown in FIG. 2D. Preferably, single or dualdamascene processes are performed to form vias and metallization layers.As is known in the art, in a damascene process, openings (trenchopenings and via openings) are formed in the dielectric layers. Ametallic material, preferably copper or copper alloys, is filled in theopenings, and a chemical mechanical polish (CMP) is then performed toremove excess metallic material. Preferably, at least one of thedielectric layers 42 is a low-k dielectric layer having a dielectricconstant (k) lower than about 3.5, and more preferably lower than about3.0.

In the preferred embodiment, as shown in FIG. 2D, test pads 44 areformed in the first metallization layer, and the connections to thedevices/circuits 40 are routed through test pads 44. In alternativeembodiments, test pads 44 may be formed starting from a metallizationlayer over the first metallization layer. The spacings between the testpads 44 preferably correspond to the respective spacings of the probeneedles 28 (refer to FIG. 2A). Test pads 44 thus form a test line in therespective metallization layer. Preferably, no test pad 44 is formed inthe intersection region 34 of the scribe lines 30 and 32.

Dielectric layers and test pads are formed layer by layer, until thetest pads 23 in the top metallization layer are formed. The resultingstructure is shown in FIGS. 2A and 2B. For purposes of illustration,test pads 23 are shown vertically aligned to and overlying therespective test pads 44. In many embodiments, the various metal linesand vias will be laterally displaced from one another depending upon thedesign and layout preferences.

In the preferred embodiment, the free region is defined as theintersection region 34 of the scribe lines 30 and 32, and the freeregion 34 preferably extends from the top surface to the bottom surfaceof the wafer. Preferably, no test pads are formed within the free region34, although a metal line connected to a test pad may extend across thefree region 34. In other embodiments, the free region is a sub regionwithin the intersection region 34, wherein the embodiments of the freeregions are discussed in detail in subsequent paragraphs.

Tests may be performed after the test pads on each metallization layerare formed. For example, the probe needles 28 (refer to FIG. 2) are putinto contact with the test pads 44 so that electrical connections aremade to the devices/circuits 40. More test pads may be formed in theoverlying metallization layers. Throughout the description, the term“test pads” is used to refer to not only test pads in the topmetallization layer, such as test pads 23 ₁ through 23 _(n), but alsothe underlying pads 44.

In a further embodiment of the present invention, as shown in FIG. 3,test lines are formed in both X and Y directions and may overlap eachother. One test line 22 is placed in the scribe line 30, which is in Xdirection. Test line 22 is preferably placed across the intersectionregion 34. Another test line 50 is placed in scribe line 32, which is inY direction. Test pads 52 are formed in test line 50. Test line 50 mayalso be placed across the intersection region 34. In this embodiment, afree region is defined as the intersection region 34. Preferably, testpads 23 and test pads 52 are formed outside the free region 34. Theresult will be that test pads 23 will be sawed in X direction, and testpads 52 will be sawed in Y direction. However, no test pads will besawed in both directions.

In further embodiments, as shown in FIG. 4, free region 35 is determinedwith respect to accumulated data obtained from wafers already cut.Scribe lines typically have a width of between about 80 and about 100μm, and greater than the kerf width, which is typically about 50 μm.Preferably, sawing will be along the center of the scribe line, althoughin practical sawing operations, the kerfs are likely to deviate from thecenterline. However, in a certain semiconductor fabrication processusing certain equipment, there is typically a maximum variation that thekerfs may deviate from the center of the scribe line. Assumingaccumulated data has indicated that kerfs are located between lines 60and 62, which define a smaller area than the intersection region 34, theprobability of kerfs reaching beyond the lines 60 and 62 issubstantially low, for example, less than about one percent. Lines 60and 62 are referred to as maximum kerf lines. Therefore, the free region35 is defined to be a rectangular region defined by lines 60 and 62 andthe boundaries of scribe line 30. In an exemplary embodiment, the freeregion 35 has a width W of less than about 65 percent of the width WS ofthe scribe lines. In other words, assuming a distance from an edge ofthe free region 35 to an edge of the intersection region 34 is ΔW, thenΔW/WS is preferably greater than about 17.5 percent.

In the embodiments shown in FIG. 4, test pads 46 may be placed out ofthe free region 35 but have a portion in the intersection region 34.Since the kerfs are more likely to be aligned to the center of thescribe lines 32, the possibility of the test pad 46 being sawed twice issubstantially low.

Referring to FIG. 5, the free region 35 is inside the intersectionregion 34 and is defined by lines 60, 62, 64 and 66, which are alsoempirical kerf boundaries. Test lines 22 and 50 are perpendicular testlines. At least one, and maybe both, test line(s) can be placed acrossthe free region 35. In an exemplary embodiment, a test pad 52 _(j) areplaced within the intersection region 34 but outside the free region 35.

One skilled in the art will realize that although test lines 22 and/or50 are shown to be across the intersection region 34 in the preferredembodiment, they can also be formed without crossing the intersectionregion 34.

By using the preferred embodiments of the present invention, a test padwill be sawed at most once. The low-k dielectric peeling problem is thussignificantly reduced. The test lines can be placed across theintersection region of the scribe lines. This not only provides greaterflexibility for test line placement, but the length of test lines andthe number of test pads in the test lines can also be increased.Additionally, since test lines are not limited by the width of the dies,there is no need to provide dies with additional chip space just for thepurpose of fitting in test lines, thus more dies can thus bemanufactured from each wafer.

Although the present invention and its advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the invention as defined by the appended claims. Moreover, thescope of the present application is not intended to be limited to theparticular embodiments of the process, machine, manufacture, andcomposition of matter, means, methods and steps described in thespecification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the present invention, processes,machines, manufacture, compositions of matter, means, methods, or steps,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present invention. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, or steps.

What is claimed is:
 1. A method of fabricating a semiconductorstructure, the method comprising: providing a semiconductor wafercomprising a first scribe line and a second scribe line perpendicular tothe first scribe line; defining a free region in an intersection regionof the first and the second scribe lines, wherein the free region isdefined as a region that when a sawing tool is used to saw thesemiconductor wafer through one of the first and the second scribelines, a probability of the sawing tool sawing outside of the freeregion is less than about one percent; and forming a test key comprisingtest pads in at least one of the first scribe line and the second scribeline, wherein two of the test pads are placed on opposite sides of thefree region, and wherein the free region is free from test pads.
 2. Themethod of claim 1 further comprising: sawing through the first scribeline using the sawing tool; and sawing through the second scribe lineusing the sawing tool to separate dies in the semiconductor wafer. 3.The method of claim 1, wherein the free region is smaller than theintersection region.
 4. The method of claim 1, wherein the intersectionregion is free from test pads.
 5. The method of claim 1, wherein one ofthe test pads is formed in the intersection region and outside of thefree region.
 6. The method of claim 1 further comprising calculating theprobability from accumulated data obtained from wafers sawed using thesawing tool.
 7. The method of claim 1, wherein the forming the test padscomprises: forming a plurality of dielectric layers; forming the testpads in the plurality of dielectric layers; and forming vias to connectto the test pads.
 8. The method of claim 1, wherein the forming the testpads is performed using damascene processes.
 9. The method of claim 1,wherein at least one of the test pads extends from outside theintersection region into the intersection region.
 10. A method offabricating a semiconductor structure, the method comprising: providinga semiconductor wafer comprising a plurality of dies and a plurality ofscribe lines separating the plurality of dies from each other, whereinthe plurality of scribe lines comprises: a first scribe line; and asecond scribe line perpendicular to the first scribe line, wherein thefirst scribe line intersects the second scribe line to define anintersection region; forming a test line in the first scribe line,wherein the test line comprises a conductive line crossing through theintersection region; and forming test pads in the test line, wherein thetest pads are formed outside a free region defined within theintersection region, wherein no test pad is allowed to be formed in thefree region, and wherein at least a portion of one of the test pads isdisposed within the intersection region.
 11. The method of claim 10,wherein a side of the free region has a distance from a respective sideof the intersection region, and wherein the distance is greater thanabout 17.5 percent of a width of the first and the second scribe lines.12. The method of claim 10, wherein the free region is defined bymaximum kerf lines in the first and the second scribe lines, and whereinthe maximum kerf lines are defined as regions wherein when a sawing toolis used to saw the semiconductor wafer, a probability of the sawing toolsawing outside of the maximum kerf lines is less than about one percent.13. The method of claim 10, wherein the free region extends from a topsurface of the semiconductor wafer to a bottom surface of thesemiconductor wafer.
 14. A method of fabricating a semiconductorstructure, the method comprising: defining a first maximum kerf regionin a first scribe line of a semiconductor wafer, wherein the firstmaximum kerf region has a first width less than a width of the firstscribe line; defining second maximum kerf region in a second scribe lineof the semiconductor wafer, wherein the second maximum kerf region has asecond width less than a width of the second scribe line, wherein thesecond scribe line is perpendicular to the first scribe line, andwherein the first scribe line intersects the second scribe line at anintersection region; defining a free region as an overlap region of thefirst and the second maximum kerf regions, respectively, the free regionhaving a size smaller than the intersection region of the first scribeline and the second scribe line; and forming a test line in the firstscribe line, wherein the test line comprises a conductive line crossingthrough the intersection region, wherein all test pads in the test lineare outside the free region, wherein a portion of at least one of thetest pads is disposed within the intersection region, and wherein the atleast one of the test pads extends from outside the intersection regioninto the intersection region.
 15. The method of claim 14, wherein thetest pads are located in a top metallization layer.
 16. The method ofclaim 14, wherein the test pads are located in a metallization layerunderlying a top metallization layer.
 17. The method of claim 14 furthercomprises sawing through the first and the second scribe lines.
 18. Themethod of claim 14, wherein the first maximum kerf region and the secondmaximum kerf region are defined as regions wherein when a sawing tool isused to saw the semiconductor wafer, a probability of the sawing toolsawing outside of the first maximum kerf region and the second maximumkerf region is less than one percent.